@misc{indiciae9565e0456aaa,
  title = {Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms},
  author = {Zoltan Donko and Aranka Derzsi and Mate Vass and Julian Schulze and Edmund Schuengel and Satoshi Hamaguchi},
  year = {2018},
  doi = {10.1088/1361-6595/aae5c3},
  url = {https://arxiv.org/abs/1809.06779},
  note = {Source identifier: 1809.06779}
}