TY  - RPRT
TI  - Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
AU  - Zoltan Donko
AU  - Aranka Derzsi
AU  - Mate Vass
AU  - Julian Schulze
AU  - Edmund Schuengel
AU  - Satoshi Hamaguchi
PY  - 2018
DO  - 10.1088/1361-6595/aae5c3
UR  - https://arxiv.org/abs/1809.06779
ID  - 1809.06779
ER  -