@misc{indiciae38878549bd58,
  title = {Multi-beam RF accelerators for ion implantation},
  author = {Peter A. Seidl and Arun Persaud and Diego Di Domenico and Johan Andreasson and Qing Ji and Wei Liang and Di Ni and Daniel Oberson and Luke Raymond and Gregory Scharfstein and Alan M. M. Todd and Amit Lal and Thomas Schenkel},
  year = {2018},
  url = {https://arxiv.org/abs/1809.08525},
  note = {Source identifier: 1809.08525}
}