@misc{indiciae25a2f3ff91e9,
  title = {Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure},
  author = {Roberto Fallica and Benjamin Watts and Benedikt Rösner and Gioia Della Giustina and Laura Brigo and Giovanna Brusatin and Yasin Ekinci},
  year = {2018},
  doi = {10.1088/1361-6528/aaccd4},
  url = {https://arxiv.org/abs/1809.09916},
  note = {Source identifier: 1809.09916}
}