TY  - RPRT
TI  - Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
AU  - Roberto Fallica
AU  - Benjamin Watts
AU  - Benedikt Rösner
AU  - Gioia Della Giustina
AU  - Laura Brigo
AU  - Giovanna Brusatin
AU  - Yasin Ekinci
PY  - 2018
DO  - 10.1088/1361-6528/aaccd4
UR  - https://arxiv.org/abs/1809.09916
ID  - 1809.09916
ER  -