@misc{indiciae7f5a3956ed15, title = {UHV-CVD Growth of High Quality GeSn Using SnCl4: From Growth Optimization to Prototype Devices}, author = {P. C. Grant and W. Dou and B. Alharthi and J. M. Grant and H. Tran and G. Abernathy and A. Mosleh and W. Du and 5 B. Li and M. Mortazavi and H. A. Naseem and S. Q. Yu}, year = {2018}, url = {https://arxiv.org/abs/1810.02523}, note = {Source identifier: 1810.02523} }