@misc{indiciaed4c9b08cb68d,
  title = {Effect of impurities on morphology and growth mode of (111) and (001) epitaxial-like ScN films},
  author = {Arnaud le Febvrier and Nina Tureson and Nina Stilkerich and Grzegorz Greczynski and Per Eklund},
  year = {2018},
  doi = {10.1088/1361-6463/aaeb1b},
  url = {https://arxiv.org/abs/1810.02593},
  note = {Source identifier: 1810.02593}
}