TY - RPRT TI - Effect of impurities on morphology and growth mode of (111) and (001) epitaxial-like ScN films AU - Arnaud le Febvrier AU - Nina Tureson AU - Nina Stilkerich AU - Grzegorz Greczynski AU - Per Eklund PY - 2018 DO - 10.1088/1361-6463/aaeb1b UR - https://arxiv.org/abs/1810.02593 ID - 1810.02593 ER -