@misc{indiciae07f1bbf05c5a,
  title = {Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations},
  author = {Florian Krüger and Tobias Gergs and Jan Trieschmann},
  year = {2018},
  doi = {10.1088/1361-6595/ab0246},
  url = {https://arxiv.org/abs/1810.04510},
  note = {Source identifier: 1810.04510}
}