TY  - RPRT
TI  - Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations
AU  - Florian Krüger
AU  - Tobias Gergs
AU  - Jan Trieschmann
PY  - 2018
DO  - 10.1088/1361-6595/ab0246
UR  - https://arxiv.org/abs/1810.04510
ID  - 1810.04510
ER  -