@misc{indiciaef9ec9520c950,
  title = {Improving the Resolution and Throughput of Achromatic Talbot Lithography},
  author = {Dimitrios Kazazis and Li-Ting Tseng and Yasin Ekinci},
  year = {2018},
  doi = {10.1116/1.5048506},
  url = {https://arxiv.org/abs/1810.05406},
  note = {Source identifier: 1810.05406}
}