TY  - RPRT
TI  - Improving the Resolution and Throughput of Achromatic Talbot Lithography
AU  - Dimitrios Kazazis
AU  - Li-Ting Tseng
AU  - Yasin Ekinci
PY  - 2018
DO  - 10.1116/1.5048506
UR  - https://arxiv.org/abs/1810.05406
ID  - 1810.05406
ER  -