@misc{indiciae8223afc85468,
  title = {Design and fabrication of robust broadband extreme ultraviolet multilayers},
  author = {Shang-qi Kuang and Jian-bo Wang and Hai-gui Yang and Tong-lin Huo and Hong-jun Zhou},
  year = {2018},
  url = {https://arxiv.org/abs/1810.06691},
  note = {Source identifier: 1810.06691}
}