TY  - RPRT
TI  - Design and fabrication of robust broadband extreme ultraviolet multilayers
AU  - Shang-qi Kuang
AU  - Jian-bo Wang
AU  - Hai-gui Yang
AU  - Tong-lin Huo
AU  - Hong-jun Zhou
PY  - 2018
UR  - https://arxiv.org/abs/1810.06691
ID  - 1810.06691
ER  -