@misc{indiciae99569808a9a0,
  title = {TCAD simulations of pixel sensors for the ATLAS ITk upgrade and performance of annealed planar pixel modules},
  author = {Julien-Christopher Beyer and Alessandro La Rosa and Anna Macchiolo and Richard Nisius and Natascha Savic and Reem Taibah},
  year = {2018},
  doi = {10.1088/1748-0221/13/11/c11001},
  url = {https://arxiv.org/abs/1810.10872},
  note = {Source identifier: 1810.10872}
}