@misc{indiciae5eb0bebcbbca,
  title = {Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium},
  author = {Joan Vila-Comamala and Lucia Romano and Vitaliy Guzenko and Matias Kagias and Marco Stampanoni and Konstantins Jefimovs},
  year = {2018},
  doi = {10.1016/j.mee.2018.01.027},
  url = {https://arxiv.org/abs/1810.12129},
  note = {Source identifier: 1810.12129}
}