TY  - RPRT
TI  - Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
AU  - Joan Vila-Comamala
AU  - Lucia Romano
AU  - Vitaliy Guzenko
AU  - Matias Kagias
AU  - Marco Stampanoni
AU  - Konstantins Jefimovs
PY  - 2018
DO  - 10.1016/j.mee.2018.01.027
UR  - https://arxiv.org/abs/1810.12129
ID  - 1810.12129
ER  -