@misc{indiciae88d7b5101ba9,
  title = {MOVPE growth of N-polar AlN on 4H-SiC: effect of substrate miscut on layer quality},
  author = {J. Lemettinen and H. Okumura and I. Kim and C. Kauppinen and T. Palacios and S. Suihkonen},
  year = {2018},
  doi = {10.1016/j.jcrysgro.2018.02.013},
  url = {https://arxiv.org/abs/1811.03528},
  note = {Source identifier: 1811.03528}
}