@misc{indiciae5f476369606b,
  title = {MOVPE growth of nitrogen- and aluminum-polar AlN on 4H-SiC},
  author = {J. Lemettinen and H. Okumura and I. Kim and M. Rudzinski and J. Grzonka and T. Palacios and S. Suihkonen},
  year = {2018},
  doi = {10.1016/j.jcrysgro.2018.02.020},
  url = {https://arxiv.org/abs/1811.03534},
  note = {Source identifier: 1811.03534}
}