@misc{indiciae6e14a3b6d0bc,
  title = {N-polar AlN buffer growth by MOVPE for transistor applications},
  author = {J. Lemettinen and H. Okumura and T. Palacios and S. Suihkonen},
  year = {2018},
  doi = {10.7567/apex.11.101002},
  url = {https://arxiv.org/abs/1811.03953},
  note = {Source identifier: 1811.03953}
}