TY  - RPRT
TI  - N-polar AlN buffer growth by MOVPE for transistor applications
AU  - J. Lemettinen
AU  - H. Okumura
AU  - T. Palacios
AU  - S. Suihkonen
PY  - 2018
DO  - 10.7567/apex.11.101002
UR  - https://arxiv.org/abs/1811.03953
ID  - 1811.03953
ER  -