@misc{indiciae01bb25885160,
  title = {Hydrodynamic and Solid Mechanics Analysis of Capillary Force-Induced Mold Deformation in Sub-10 nm UV Nanoimprint Lithography},
  author = {Jingxuan Cai and Wen-Di Li},
  year = {2019},
  url = {https://arxiv.org/abs/1811.05103},
  note = {Source identifier: 1811.05103}
}