TY  - RPRT
TI  - Hydrodynamic and Solid Mechanics Analysis of Capillary Force-Induced Mold Deformation in Sub-10 nm UV Nanoimprint Lithography
AU  - Jingxuan Cai
AU  - Wen-Di Li
PY  - 2019
UR  - https://arxiv.org/abs/1811.05103
ID  - 1811.05103
ER  -