TY  - RPRT
TI  - Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials
AU  - Mounika Vutukuru
AU  - Jason W. Christopher
AU  - Corey Pollock
AU  - David J. Bishop
AU  - Anna K. Swan
PY  - 2018
UR  - https://arxiv.org/abs/1811.05450
ID  - 1811.05450
ER  -