@misc{indiciaeaf55486ca4a6, title = {Etching of semiconductors and metals by the photonic jet with shaped optical fiber tips}, author = {Robin Pierron and Sylvain Lecler and Julien Zelgowski and Pierre Pfeiffer and Frédéric Mermet and Joël Fontaine}, year = {2018}, doi = {10.1016/j.apsusc.2017.01.277}, url = {https://arxiv.org/abs/1811.06920}, note = {Source identifier: 1811.06920} }