TY  - RPRT
TI  - Etching of semiconductors and metals by the photonic jet with shaped optical fiber tips
AU  - Robin Pierron
AU  - Sylvain Lecler
AU  - Julien Zelgowski
AU  - Pierre Pfeiffer
AU  - Frédéric Mermet
AU  - Joël Fontaine
PY  - 2018
DO  - 10.1016/j.apsusc.2017.01.277
UR  - https://arxiv.org/abs/1811.06920
ID  - 1811.06920
ER  -