@misc{indiciae686cd59df7cf,
  title = {Effect of AlN Seed Layer on Crystallographic Characterization of Piezoelectric AlN},
  author = {Kaitlin M. Howell and Waqas Bashir and Annalisa de Pastina and Ramin Matloub and Paul Muralt and Luis G. Villanueva},
  year = {2018},
  url = {https://arxiv.org/abs/1811.09156},
  note = {Source identifier: 1811.09156}
}