TY - RPRT TI - Effect of AlN Seed Layer on Crystallographic Characterization of Piezoelectric AlN AU - Kaitlin M. Howell AU - Waqas Bashir AU - Annalisa de Pastina AU - Ramin Matloub AU - Paul Muralt AU - Luis G. Villanueva PY - 2018 UR - https://arxiv.org/abs/1811.09156 ID - 1811.09156 ER -