TY  - RPRT
TI  - Sub-nanometer height sensitivity by phase shifting interference microscopy under ambient environmental fluctuations
AU  - Azeem Ahmad
AU  - Vishesh Dubey
AU  - Ankit Butola
AU  - Jean-Claude Tinguely
AU  - Balpreet Singh Ahluwalia
AU  - Dalip Singh Mehta
PY  - 2018
UR  - https://arxiv.org/abs/1812.00378
ID  - 1812.00378
ER  -