@misc{indiciae891e852b7291,
  title = {High-Precision Contactless Optical 3D-Metrology of Silicon Sensors},
  author = {E. Lavrik and I. Panasenko and S. Mehta and U. Frankenfeld and H. R. Schmidt},
  year = {2018},
  doi = {10.1016/j.nima.2019.04.039},
  url = {https://arxiv.org/abs/1812.00917},
  note = {Source identifier: 1812.00917}
}