@misc{indiciaedb2111005b4c,
  title = {Thickness Dependence of the Physical Properties of Atomic-Layer Deposited Al2O3},
  author = {Yael Etinger-Geller and Ekaterina Zoubenko and Maria Baskin and Lior Kornblum and Boaz Pokroy},
  year = {2018},
  doi = {10.1063/1.5079987},
  url = {https://arxiv.org/abs/1812.02382},
  note = {Source identifier: 1812.02382}
}