TY  - RPRT
TI  - Thickness Dependence of the Physical Properties of Atomic-Layer Deposited Al2O3
AU  - Yael Etinger-Geller
AU  - Ekaterina Zoubenko
AU  - Maria Baskin
AU  - Lior Kornblum
AU  - Boaz Pokroy
PY  - 2018
DO  - 10.1063/1.5079987
UR  - https://arxiv.org/abs/1812.02382
ID  - 1812.02382
ER  -