@misc{indiciaedead22ce4f35,
  title = {Fabrication of phononic filter structures for far-IR/sub-mm detector applications},
  author = {Kevin L. Denis and Karwan Rostem and Marco A. Sagliocca and Elissa H. Williams and Edward J. Wollack},
  year = {2018},
  url = {https://arxiv.org/abs/1812.08612},
  note = {Source identifier: 1812.08612}
}