@misc{indiciae26e806de7d03, title = {Uncertainty evalutation through data modelling for dimensional nanoscale measurements}, author = {J. Pétry and B. De Boeck and N. Sebaihi and M. Coenegrachts and T. Caebergs and M. Dobre}, year = {2018}, url = {https://arxiv.org/abs/1812.09157}, note = {Source identifier: 1812.09157} }