@misc{indiciaee1da97b17e76,
  title = {Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach},
  author = {M. V. Moro and R. Holeňák and L. Zendejas Medina and U. Jansson and D. Primetzhofer},
  year = {2019},
  doi = {10.1016/j.tsf.2019.137416},
  url = {https://arxiv.org/abs/1812.10340},
  note = {Source identifier: 1812.10340}
}