TY  - RPRT
TI  - Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach
AU  - M. V. Moro
AU  - R. Holeňák
AU  - L. Zendejas Medina
AU  - U. Jansson
AU  - D. Primetzhofer
PY  - 2019
DO  - 10.1016/j.tsf.2019.137416
UR  - https://arxiv.org/abs/1812.10340
ID  - 1812.10340
ER  -