@misc{indiciaefa5b460522e8, title = {A wet etching method for few-layer black phosphorus with an atomic accuracy and compatibility with major lithography techniques}, author = {Teren Liu and Tao Fang and Karen Kavanagh and Guangrui and Xia}, year = {2019}, url = {https://arxiv.org/abs/1901.01682}, note = {Source identifier: 1901.01682} }