TY - RPRT TI - A wet etching method for few-layer black phosphorus with an atomic accuracy and compatibility with major lithography techniques AU - Teren Liu AU - Tao Fang AU - Karen Kavanagh AU - Guangrui AU - Xia PY - 2019 UR - https://arxiv.org/abs/1901.01682 ID - 1901.01682 ER -