@misc{indiciaeedd0c6c85c9d,
  title = {Enhancing Interconnect Reliability and Performance by Converting Tantalum to 2D Layered Tantalum Sulfide at Low Temperature},
  author = {Chun-Li Lo and Massimo Catalano and Ava Khosravi and Wanying Ge and Yujin Ji and Dmitry Y. Zemlyanov and Luhua Wang and Rafik Addou and Yuanyue Liu and Robert M. Wallace and Moon J. Kim and Zhihong Chen},
  year = {2019},
  url = {https://arxiv.org/abs/1901.08143},
  note = {Source identifier: 1901.08143}
}