@misc{indiciae15f811a8635e,
  title = {Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substrates},
  author = {Kirill V. Chizh and Larisa V. Arapkina and Dmitry B. Stavrovsky and Peter I. Gaiduk and Vladimir A. Yuryev},
  year = {2019},
  doi = {10.1016/j.mssp.2019.04.014},
  url = {https://arxiv.org/abs/1901.10748},
  note = {Source identifier: 1901.10748}
}