TY  - RPRT
TI  - Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substrates
AU  - Kirill V. Chizh
AU  - Larisa V. Arapkina
AU  - Dmitry B. Stavrovsky
AU  - Peter I. Gaiduk
AU  - Vladimir A. Yuryev
PY  - 2019
DO  - 10.1016/j.mssp.2019.04.014
UR  - https://arxiv.org/abs/1901.10748
ID  - 1901.10748
ER  -