@misc{indiciaee6acf3b58f16, title = {A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits}, author = {Frederik Schmidt and Jan Trieschmann and Tobias Gergs and Thomas Mussenbrock}, year = {2019}, doi = {10.1063/1.5091965}, url = {https://arxiv.org/abs/1902.02074}, note = {Source identifier: 1902.02074} }