TY  - RPRT
TI  - A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits
AU  - Frederik Schmidt
AU  - Jan Trieschmann
AU  - Tobias Gergs
AU  - Thomas Mussenbrock
PY  - 2019
DO  - 10.1063/1.5091965
UR  - https://arxiv.org/abs/1902.02074
ID  - 1902.02074
ER  -