TY  - RPRT
TI  - Planarized Fabrication Process With Two Layers of SIS Josephson Junctions and Integration of SIS and SFS π-Junctions
AU  - Sergey K. Tolpygo
AU  - Vladimir Bolkhovsky
AU  - Ravi Rastogi
AU  - Scott Zarr
AU  - Alexandra L. Day
AU  - Evan Golden
AU  - Terence J. Weir
AU  - Alex Wynn
AU  - Leonard M. Johnson
PY  - 2019
DO  - 10.1109/tasc.2019.2901709
UR  - https://arxiv.org/abs/1902.02830
ID  - 1902.02830
ER  -