@misc{indiciae76aa4076f4a1, title = {DSA-aware multiple patterning for the manufacturing of vias: Connections to graph coloring problems, IP formulations, and numerical experiments}, author = {Dehia Ait-Ferhat and Vincent Juliard and Gautier Stauffer and Juan Andres Torres}, year = {2019}, url = {https://arxiv.org/abs/1902.04145}, note = {Source identifier: 1902.04145} }