TY - RPRT TI - DSA-aware multiple patterning for the manufacturing of vias: Connections to graph coloring problems, IP formulations, and numerical experiments AU - Dehia Ait-Ferhat AU - Vincent Juliard AU - Gautier Stauffer AU - Juan Andres Torres PY - 2019 UR - https://arxiv.org/abs/1902.04145 ID - 1902.04145 ER -