@misc{indiciae19a3a778479f,
  title = {Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and non-linear effects},
  author = {Florian Lemke and Yasmina Frey and Binal P Bruno and Katrin Philipp and Nektarios Koukourakis and Jürgen Czarske and Ulrike Wallrabe and Matthias C Wapler},
  year = {2019},
  doi = {10.1088/1361-665x/ab0eb3},
  url = {https://arxiv.org/abs/1902.05366},
  note = {Source identifier: 1902.05366}
}