TY  - RPRT
TI  - Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and non-linear effects
AU  - Florian Lemke
AU  - Yasmina Frey
AU  - Binal P Bruno
AU  - Katrin Philipp
AU  - Nektarios Koukourakis
AU  - Jürgen Czarske
AU  - Ulrike Wallrabe
AU  - Matthias C Wapler
PY  - 2019
DO  - 10.1088/1361-665x/ab0eb3
UR  - https://arxiv.org/abs/1902.05366
ID  - 1902.05366
ER  -