@misc{indiciae527335c9f077, title = {Development of transmon qubits solely from optical lithography on 300mm wafers}, author = {N. Foroozani and C. Hobbs and C. C. Hung and S. Olson and D. Ashworth and E. Holland and M. Malloy and P. Kearney and B. O'Brien and B. Bunday and D. DiPaola and W. Advocate and T. Murray and P. Hansen and S. Novak and S. Bennett and M. Rodgers and B. Baker-O'Neal and B. Sapp and E. Barth and J. Hedrick and R. Goldblatt and S. S. Papa Rao and K. D. Osborn}, year = {2019}, doi = {10.1088/2058-9565/ab0ca8}, url = {https://arxiv.org/abs/1902.08501}, note = {Source identifier: 1902.08501} }