@misc{indiciaeeaa45efed89a, title = {Deep Learning-Guided Surface Characterization for Autonomous Hydrogen Lithography}, author = {Mohammad Rashidi and Jeremiah Croshaw and Kieran Mastel and Marcus Tamura and Hedieh Hosseinzadeh and Robert A. Wolkow}, year = {2019}, doi = {10.1088/2632-2153/ab6d5e}, url = {https://arxiv.org/abs/1902.08818}, note = {Source identifier: 1902.08818} }